Kawasaki robot TTS Series Robot

TTS Series Robot

The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

TTS SERIES ROBOTS:

TTS10 Degree of freedom – 4 axes
TTS20 Degree of freedom – 5 axes

Applications:

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TTS Series Robot SPECIFICATIONS

Model Standard Option
TTS10 TTS20
Structure Telescopic horizontal articulated type
Arm Single arm Double arm
Degree of freedom (axes) 4 5
Motion range θ1 axis (rotationJT2(°) 340
Z axis (up-downJT3)() 740
θ2 axis (rotationJT4)(°) 340
H1 axis (rotationJT6)(°) 340
H2 axis (rotationJT7)(°) 340
Maximum reach (mm) 1,066
Repeatability (mm)*1 ±0.1 (Wafer Center)
Cleanliness*2 ISO Class 1
Hand specification*3 Edge gripper / Vacuum
Controller / Power Requirements D60 / MAX.1.0kVA Teach pendant
Robot haness (1-5m)*4 Operation box
Software Standard software for oparation KRET
KMTerm KR3D
KSUtility Lite KSUtility
Manual Operation manual
Communication command manual
Introduction procedure for integrated package software (K-Fast)
Others Aligner
Mapping sensor

*1: The figure conforms to ISO9283.

*2: The figure is measured in our clean booth.

*3: The standard robot arm does not include a hand.

*4: A robot harness is available with the length from 1 to 5 meters (1, 2, 2.5, 3, 3.5, 4, 4.5, and 5).

For more detail, please contact Kawasaki representatives in your region.

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